TRIM/SRIM Monte Carlo Simulation for Crosslight NovaTCAD

Welcome everybody my name is Stan and on
behalf of Crosslight software

Ill be giving you a tutorial on TRIM.
TRIM is thecalculation part of the software package

SRIM. It's mainly used to calculate dopant
profiles after ion implantation

these dopant profiles can then be used by Crosslight
software

trip is a Monte Carlo simulation

It treats all the target
materials amorphous.

In most cases
the simulation results of trim

fit the experiments
of crystal target very well

let's begin our tutorial

first of all we need to log into the
official site of SRIM, www.SRIM.org

Then click download SRIM 2013

there's two versions of SRIM standard and

professional for this tutorial we need
the standard version

instructions for installation are on this
website It's pretty straightforward let's

follow the instructions

first let's put the installation program
on the desktop setup a new file and

name it as a SRIM 2013

Then move the installation
program to the folder and rename it

We're gonna call it SRIM-2013.exe

now Let's run the installation the program
is actually a compressed package

installation process is only an
extraction

right now the stream programs installed
let's open the executable file this

brings up the starting interface of this
room

since we only used trim trim calculation
unfortunately our program Ashley froze

you it's a small bug this program the
developers of this program only using

list for non unicode program if your
computer system is not in English it'll

stop like this in order to solve this
problem first of all when you close the

program

right let's bring up the control panel
now we're looking for regional language

under the panel Administrative click on
the button of change system locale to

change the current language for non
unicode programs you can see I chose

language as Chinese previously therefore
I need to change it to English let's use

English Canada

change the system wavelet to restart the
computer click on restart

after restarting your computer lets
reopen the program

calculation if everything's ok we should
see the setup window of true

of Windows divided into three parts
first part is I R data second part is

target Dadda the last as the special
parameters for the simulation and the

buns from running saving elixir chura
let's begin with iron in the ion

dissociation you can choose the type of
trim calculation for ion implantation or

just use the default option I own
distribution and quick calculation of

damage since is the fastest oh we're
only too much detail the implantation

but only the file open distribution
profile click on the PTT button he

reaches the implant ion know that this
program can only choose a single element

for implantation we can't choose
molecules

chose boron for demonstration purposes

four parameters of Ireland outta atomic
number in masses default as employers

oil change implantation energy and angle
as we want for energy its default as 10

killer electron volts you all changed to
fifty years the ion implantation nail

that deviates from the normal direction
of the target surface the second part

now is the target of the default target
material the program is set as a single

layer

if your target misuse multi-layered
click on Add new layer you can edit the

landing here for simplicity only set one
layer but you can certainly multiple

layers if you need to

on the road side of this section it's
the setting for target material if you

told your materials a single element Li
silly comment click on the PPT buns and

cheese silicon

however if your target material is
complicated first you can search from

the compound dictionary the program has
included various types of target

materials for example under common
implementation compounds there are many

types of class there are also many types
of metals and alloys

I chose gallium crystal you can see the
message code you it's also a small bug

true but don't worry about that will
skip click on Add occur where you'll see

the elements you delete the first column
which is the one who said his circle

reversed rosary if you can't find the
target material in the compound

dictionary you can still manually enter
the material because trimmed read all

the target materials as a more biz we
can edit the target material as reward

without considering details in the
crystal structure

for example like to set the target
material as hafnium oxide first all add

HFL in the tournament you click on Add
New elemental air and oxygen

stoichiometry should be wanted to change
the Dead Sea value to the deaths of the

you've had your mark side it's a
critical parameter make sure you put the

correct value

the density of hafnium oxide is nine
point six grams per cubic centimeter the

with values the thickness of your target
material the unit of the thicknesses

defaulters engstrom you can change units

it's the special parameters for
simulation for example this value means

to Syria simulation results at every ten
thousand islands since the software uses

Monte Carlo simulation the number of
ions setting you is not related to the

dose of ion implantation it's only
perimeter of the simulation the higher

the number is the more precise the
result will be the phone numbers 999999

you can increase the numbers you want in
this journal will keep the default

number unchanged

advantage of the ROC reason is that if
your computer acid daily shuts down and

you still keep the latest results the
temporary file

now that we've said all the initial
parameters click on save and run to

begin the simulation what's the
simulation begins a new window popup

this bone can pause and continue the
simulation process on the panel upper

left corner it's the simulation
information completed means how many

islands of implanted into the target the
position of every atom is decided by the

Monte Carlo calculation theoretically
the program simulates where the Adams

should stop when bombarded into the
target material

the plot window displays the depth of
the target as the x coordinate you the

ranges from 0 to 10,000 m for the
meaning other options you can learn by

yourself through clicking the question
what they're like to mention his own

distribution this feed you because this
figure displays the doping profile in

real time

excoriated as target depth the y
coordinate however is not concentration

instead it's a ratio of concentration
overdose

the reason is since the target materials
amorphis the distribution of the

implanted ions is independent of dose
the concentration of doping will scale

linearly according to the implant dose
therefore we need to do additional data

processing when we get the final results
by multiplying the dose 31 ordained the

final simulation results doping
concentration profile if we want to be

more precise simulation result there's
another bremner we need to revise its

real ion distribution

it's really care about the info the red
peach there's a lot of blank info you

$100 points in the final results which
means you'll get a lot of zero values in

yrs old if the target depth range is too
large

eighty percent of the final results will
be useless therefore we need to change

the parameters in the plot window change
trim you can see some of the parameters

turn yella those of the values you can
change during the simulation including

element energy and angle the parameters
we need a change in the plot by

referring to the ion distribution figure
will see that the valid data and around

3000 Xtra

now click on and edit restart the
simulation click on the Continue button

I and distribution you'll see useful
data points cover almost the whole

target

the XY longitudinal for use the
two-dimensional distribution of the data

point meanwhile I distribution figure is
one-dimensional distribution normally we

only need one dimensional distribution
of a doping profile

color of the bar changes from green to
red simulation to lend to make the

simulation quicker we can simply close
windows we don't need now the

simulations finished with the simulation
finishes the program will pop up window

to let you see the result you
accidentally closed the window you can

see the result by clicking on FB

you can also verify the simulation
results by opening the ion distribution

you can see that the doping profile used
mood which means we ventured enough

numbers if you find that you don't
profiles roth probably need to increase

the IR number next time you do the
simulation

on any money but it makes no difference
to use the directory that you want to

see the results in Annecy within the
installation folder

was during the installation folder

far as they're just generate range and
$80 these are the profiles they can be

imported into cross-legged software

he doesn't use the information to the
simulation process including energy and

target materials the final simulation
result of doping profile is saved in the

range text boulder you can see the
dublin-born calls you when using the

data don't forget that the value newborn
column is not borne concentration to 10

concentration that you need to multiply
those values the dose that you want

therefore by using ion implantation
simulation we have 10 doping profiles

that then may be used in and imported
into Crossley and that about wraps up

bertram tutorial don't forget to check
out our other software tutorials and on

behalf of cross late software have a
good one