Welcome everybody my name is Stan and on behalf of Crosslight software
Ill be giving you a tutorial on TRIM. TRIM is thecalculation part of the software package
SRIM. It's mainly used to calculate dopant profiles after ion implantation
these dopant profiles can then be used by Crosslight software
trip is a Monte Carlo simulation
It treats all the target materials amorphous.
In most cases the simulation results of trim
fit the experiments of crystal target very well
let's begin our tutorial
first of all we need to log into the official site of SRIM, www.SRIM.org
Then click download SRIM 2013
there's two versions of SRIM standard and
professional for this tutorial we need the standard version
instructions for installation are on this website It's pretty straightforward let's
follow the instructions
first let's put the installation program on the desktop setup a new file and
name it as a SRIM 2013
Then move the installation program to the folder and rename it
We're gonna call it SRIM-2013.exe
now Let's run the installation the program is actually a compressed package
installation process is only an extraction
right now the stream programs installed let's open the executable file this
brings up the starting interface of this room
since we only used trim trim calculation unfortunately our program Ashley froze
you it's a small bug this program the developers of this program only using
list for non unicode program if your computer system is not in English it'll
stop like this in order to solve this problem first of all when you close the
program
right let's bring up the control panel now we're looking for regional language
under the panel Administrative click on the button of change system locale to
change the current language for non unicode programs you can see I chose
language as Chinese previously therefore I need to change it to English let's use
English Canada
change the system wavelet to restart the computer click on restart
after restarting your computer lets reopen the program
calculation if everything's ok we should see the setup window of true
of Windows divided into three parts first part is I R data second part is
target Dadda the last as the special parameters for the simulation and the
buns from running saving elixir chura let's begin with iron in the ion
dissociation you can choose the type of trim calculation for ion implantation or
just use the default option I own distribution and quick calculation of
damage since is the fastest oh we're only too much detail the implantation
but only the file open distribution profile click on the PTT button he
reaches the implant ion know that this program can only choose a single element
for implantation we can't choose molecules
chose boron for demonstration purposes
four parameters of Ireland outta atomic number in masses default as employers
oil change implantation energy and angle as we want for energy its default as 10
killer electron volts you all changed to fifty years the ion implantation nail
that deviates from the normal direction of the target surface the second part
now is the target of the default target material the program is set as a single
layer
if your target misuse multi-layered click on Add new layer you can edit the
landing here for simplicity only set one layer but you can certainly multiple
layers if you need to
on the road side of this section it's the setting for target material if you
told your materials a single element Li silly comment click on the PPT buns and
cheese silicon
however if your target material is complicated first you can search from
the compound dictionary the program has included various types of target
materials for example under common implementation compounds there are many
types of class there are also many types of metals and alloys
I chose gallium crystal you can see the message code you it's also a small bug
true but don't worry about that will skip click on Add occur where you'll see
the elements you delete the first column which is the one who said his circle
reversed rosary if you can't find the target material in the compound
dictionary you can still manually enter the material because trimmed read all
the target materials as a more biz we can edit the target material as reward
without considering details in the crystal structure
for example like to set the target material as hafnium oxide first all add
HFL in the tournament you click on Add New elemental air and oxygen
stoichiometry should be wanted to change the Dead Sea value to the deaths of the
you've had your mark side it's a critical parameter make sure you put the
correct value
the density of hafnium oxide is nine point six grams per cubic centimeter the
with values the thickness of your target material the unit of the thicknesses
defaulters engstrom you can change units
it's the special parameters for simulation for example this value means
to Syria simulation results at every ten thousand islands since the software uses
Monte Carlo simulation the number of ions setting you is not related to the
dose of ion implantation it's only perimeter of the simulation the higher
the number is the more precise the result will be the phone numbers 999999
you can increase the numbers you want in this journal will keep the default
number unchanged
advantage of the ROC reason is that if your computer acid daily shuts down and
you still keep the latest results the temporary file
now that we've said all the initial parameters click on save and run to
begin the simulation what's the simulation begins a new window popup
this bone can pause and continue the simulation process on the panel upper
left corner it's the simulation information completed means how many
islands of implanted into the target the position of every atom is decided by the
Monte Carlo calculation theoretically the program simulates where the Adams
should stop when bombarded into the target material
the plot window displays the depth of the target as the x coordinate you the
ranges from 0 to 10,000 m for the meaning other options you can learn by
yourself through clicking the question what they're like to mention his own
distribution this feed you because this figure displays the doping profile in
real time
excoriated as target depth the y coordinate however is not concentration
instead it's a ratio of concentration overdose
the reason is since the target materials amorphis the distribution of the
implanted ions is independent of dose the concentration of doping will scale
linearly according to the implant dose therefore we need to do additional data
processing when we get the final results by multiplying the dose 31 ordained the
final simulation results doping concentration profile if we want to be
more precise simulation result there's another bremner we need to revise its
real ion distribution
it's really care about the info the red peach there's a lot of blank info you
$100 points in the final results which means you'll get a lot of zero values in
yrs old if the target depth range is too large
eighty percent of the final results will be useless therefore we need to change
the parameters in the plot window change trim you can see some of the parameters
turn yella those of the values you can change during the simulation including
element energy and angle the parameters we need a change in the plot by
referring to the ion distribution figure will see that the valid data and around
3000 Xtra
now click on and edit restart the simulation click on the Continue button
I and distribution you'll see useful data points cover almost the whole
target
the XY longitudinal for use the two-dimensional distribution of the data
point meanwhile I distribution figure is one-dimensional distribution normally we
only need one dimensional distribution of a doping profile
color of the bar changes from green to red simulation to lend to make the
simulation quicker we can simply close windows we don't need now the
simulations finished with the simulation finishes the program will pop up window
to let you see the result you accidentally closed the window you can
see the result by clicking on FB
you can also verify the simulation results by opening the ion distribution
you can see that the doping profile used mood which means we ventured enough
numbers if you find that you don't profiles roth probably need to increase
the IR number next time you do the simulation
on any money but it makes no difference to use the directory that you want to
see the results in Annecy within the installation folder
was during the installation folder
far as they're just generate range and $80 these are the profiles they can be
imported into cross-legged software
he doesn't use the information to the simulation process including energy and
target materials the final simulation result of doping profile is saved in the
range text boulder you can see the dublin-born calls you when using the
data don't forget that the value newborn column is not borne concentration to 10
concentration that you need to multiply those values the dose that you want
therefore by using ion implantation simulation we have 10 doping profiles
that then may be used in and imported into Crossley and that about wraps up
bertram tutorial don't forget to check out our other software tutorials and on
behalf of cross late software have a good one