WEBVTT

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Welcome everybody my name is Stan and on
behalf of Crosslight software

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Ill be giving you a tutorial on TRIM.
TRIM is thecalculation part of the software package

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SRIM. It's mainly used to calculate dopant
profiles after ion implantation 


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these dopant profiles can then be used by Crosslight
software

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trip is a Monte Carlo simulation

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It treats all the target
materials amorphous.

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In most cases 
the simulation results of trim

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fit the experiments 
of crystal target very well

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let's begin our tutorial

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first of all we need to log into the
official site of SRIM, www.SRIM.org

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Then click download SRIM 2013

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there's two versions of SRIM standard and

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professional for this tutorial we need
the standard version

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instructions for installation are on this
website It's pretty straightforward let's

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follow the instructions

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first let's put the installation program
on the desktop setup a new file and

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name it as a SRIM 2013

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Then move the installation
program to the folder and rename it

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We're gonna call it SRIM-2013.exe

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now Let's run the installation the program
is actually a compressed package

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installation process is only an
extraction

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right now the stream programs installed
let's open the executable file this

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brings up the starting interface of this
room

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since we only used trim trim calculation
unfortunately our program Ashley froze

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you it's a small bug this program the
developers of this program only using

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list for non unicode program if your
computer system is not in English it'll

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stop like this in order to solve this
problem first of all when you close the

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program

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right let's bring up the control panel
now we're looking for regional language

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under the panel Administrative click on
the button of change system locale to

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change the current language for non
unicode programs you can see I chose

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language as Chinese previously therefore
I need to change it to English let's use

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English Canada

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change the system wavelet to restart the
computer click on restart

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after restarting your computer lets
reopen the program

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calculation if everything's ok we should
see the setup window of true

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of Windows divided into three parts
first part is I R data second part is

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target Dadda the last as the special
parameters for the simulation and the

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buns from running saving elixir chura
let's begin with iron in the ion

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dissociation you can choose the type of
trim calculation for ion implantation or

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just use the default option I own
distribution and quick calculation of

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damage since is the fastest oh we're
only too much detail the implantation

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but only the file open distribution
profile click on the PTT button he

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reaches the implant ion know that this
program can only choose a single element

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for implantation we can't choose
molecules

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chose boron for demonstration purposes

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four parameters of Ireland outta atomic
number in masses default as employers

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oil change implantation energy and angle
as we want for energy its default as 10

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killer electron volts you all changed to
fifty years the ion implantation nail

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that deviates from the normal direction
of the target surface the second part

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now is the target of the default target
material the program is set as a single

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layer

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if your target misuse multi-layered
click on Add new layer you can edit the

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landing here for simplicity only set one
layer but you can certainly multiple

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layers if you need to

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on the road side of this section it's
the setting for target material if you

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told your materials a single element Li
silly comment click on the PPT buns and

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cheese silicon

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however if your target material is
complicated first you can search from

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the compound dictionary the program has
included various types of target

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materials for example under common
implementation compounds there are many

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types of class there are also many types
of metals and alloys

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I chose gallium crystal you can see the
message code you it's also a small bug

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true but don't worry about that will
skip click on Add occur where you'll see

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the elements you delete the first column
which is the one who said his circle

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reversed rosary if you can't find the
target material in the compound

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dictionary you can still manually enter
the material because trimmed read all

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the target materials as a more biz we
can edit the target material as reward

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without considering details in the
crystal structure

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for example like to set the target
material as hafnium oxide first all add

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HFL in the tournament you click on Add
New elemental air and oxygen

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stoichiometry should be wanted to change
the Dead Sea value to the deaths of the

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you've had your mark side it's a
critical parameter make sure you put the

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correct value

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the density of hafnium oxide is nine
point six grams per cubic centimeter the

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with values the thickness of your target
material the unit of the thicknesses

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defaulters engstrom you can change units

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it's the special parameters for
simulation for example this value means

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to Syria simulation results at every ten
thousand islands since the software uses

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Monte Carlo simulation the number of
ions setting you is not related to the

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dose of ion implantation it's only
perimeter of the simulation the higher

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the number is the more precise the
result will be the phone numbers 999999

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you can increase the numbers you want in
this journal will keep the default

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number unchanged

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advantage of the ROC reason is that if
your computer acid daily shuts down and

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you still keep the latest results the
temporary file

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now that we've said all the initial
parameters click on save and run to

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begin the simulation what's the
simulation begins a new window popup

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this bone can pause and continue the
simulation process on the panel upper

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left corner it's the simulation
information completed means how many

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islands of implanted into the target the
position of every atom is decided by the

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Monte Carlo calculation theoretically
the program simulates where the Adams

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should stop when bombarded into the
target material

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the plot window displays the depth of
the target as the x coordinate you the

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ranges from 0 to 10,000 m for the
meaning other options you can learn by

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yourself through clicking the question
what they're like to mention his own

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distribution this feed you because this
figure displays the doping profile in

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real time

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excoriated as target depth the y
coordinate however is not concentration

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instead it's a ratio of concentration
overdose

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the reason is since the target materials
amorphis the distribution of the

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implanted ions is independent of dose
the concentration of doping will scale

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linearly according to the implant dose
therefore we need to do additional data

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processing when we get the final results
by multiplying the dose 31 ordained the

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final simulation results doping
concentration profile if we want to be

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more precise simulation result there's
another bremner we need to revise its

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real ion distribution

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it's really care about the info the red
peach there's a lot of blank info you

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$100 points in the final results which
means you'll get a lot of zero values in

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yrs old if the target depth range is too
large

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eighty percent of the final results will
be useless therefore we need to change

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the parameters in the plot window change
trim you can see some of the parameters

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turn yella those of the values you can
change during the simulation including

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element energy and angle the parameters
we need a change in the plot by

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referring to the ion distribution figure
will see that the valid data and around

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3000 Xtra

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now click on and edit restart the
simulation click on the Continue button

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I and distribution you'll see useful
data points cover almost the whole

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target

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the XY longitudinal for use the
two-dimensional distribution of the data

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point meanwhile I distribution figure is
one-dimensional distribution normally we

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only need one dimensional distribution
of a doping profile

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color of the bar changes from green to
red simulation to lend to make the

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simulation quicker we can simply close
windows we don't need now the

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simulations finished with the simulation
finishes the program will pop up window

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to let you see the result you
accidentally closed the window you can

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see the result by clicking on FB

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you can also verify the simulation
results by opening the ion distribution

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you can see that the doping profile used
mood which means we ventured enough

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numbers if you find that you don't
profiles roth probably need to increase

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the IR number next time you do the
simulation

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on any money but it makes no difference
to use the directory that you want to

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see the results in Annecy within the
installation folder

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was during the installation folder

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far as they're just generate range and
$80 these are the profiles they can be

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imported into cross-legged software

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he doesn't use the information to the
simulation process including energy and

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target materials the final simulation
result of doping profile is saved in the

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range text boulder you can see the
dublin-born calls you when using the

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data don't forget that the value newborn
column is not borne concentration to 10

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concentration that you need to multiply
those values the dose that you want

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therefore by using ion implantation
simulation we have 10 doping profiles

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that then may be used in and imported
into Crossley and that about wraps up

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bertram tutorial don't forget to check
out our other software tutorials and on

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behalf of cross late software have a
good one