0:00:00.000,0:00:06.370
Welcome everybody my name is Stan and on[br]behalf of Crosslight software

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Ill be giving you a tutorial on TRIM.[br]TRIM is thecalculation part of the software package

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SRIM. It's mainly used to calculate dopant[br]profiles after ion implantation [br]

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these dopant profiles can then be used by Crosslight[br]software

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trip is a Monte Carlo simulation

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It treats all the target[br]materials amorphous.

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In most cases [br]the simulation results of trim

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fit the experiments [br]of crystal target very well

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let's begin our tutorial

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first of all we need to log into the[br]official site of SRIM, www.SRIM.org

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Then click download SRIM 2013

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there's two versions of SRIM standard and

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professional for this tutorial we need[br]the standard version

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instructions for installation are on this[br]website It's pretty straightforward let's

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follow the instructions

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first let's put the installation program[br]on the desktop setup a new file and

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name it as a SRIM 2013

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Then move the installation[br]program to the folder and rename it

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We're gonna call it SRIM-2013.exe

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now Let's run the installation the program[br]is actually a compressed package

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installation process is only an[br]extraction

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right now the stream programs installed[br]let's open the executable file this

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brings up the starting interface of this[br]room

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since we only used trim trim calculation[br]unfortunately our program Ashley froze

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you it's a small bug this program the[br]developers of this program only using

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list for non unicode program if your[br]computer system is not in English it'll

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stop like this in order to solve this[br]problem first of all when you close the

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program

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right let's bring up the control panel[br]now we're looking for regional language

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under the panel Administrative click on[br]the button of change system locale to

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change the current language for non[br]unicode programs you can see I chose

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language as Chinese previously therefore[br]I need to change it to English let's use

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English Canada

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change the system wavelet to restart the[br]computer click on restart

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after restarting your computer lets[br]reopen the program

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calculation if everything's ok we should[br]see the setup window of true

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of Windows divided into three parts[br]first part is I R data second part is

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target Dadda the last as the special[br]parameters for the simulation and the

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buns from running saving elixir chura[br]let's begin with iron in the ion

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dissociation you can choose the type of[br]trim calculation for ion implantation or

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just use the default option I own[br]distribution and quick calculation of

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damage since is the fastest oh we're[br]only too much detail the implantation

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but only the file open distribution[br]profile click on the PTT button he

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reaches the implant ion know that this[br]program can only choose a single element

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for implantation we can't choose[br]molecules

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chose boron for demonstration purposes

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four parameters of Ireland outta atomic[br]number in masses default as employers

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oil change implantation energy and angle[br]as we want for energy its default as 10

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killer electron volts you all changed to[br]fifty years the ion implantation nail

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that deviates from the normal direction[br]of the target surface the second part

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now is the target of the default target[br]material the program is set as a single

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layer

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if your target misuse multi-layered[br]click on Add new layer you can edit the

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landing here for simplicity only set one[br]layer but you can certainly multiple

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layers if you need to

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on the road side of this section it's[br]the setting for target material if you

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told your materials a single element Li[br]silly comment click on the PPT buns and

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cheese silicon

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however if your target material is[br]complicated first you can search from

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the compound dictionary the program has[br]included various types of target

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materials for example under common[br]implementation compounds there are many

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types of class there are also many types[br]of metals and alloys

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I chose gallium crystal you can see the[br]message code you it's also a small bug

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true but don't worry about that will[br]skip click on Add occur where you'll see

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the elements you delete the first column[br]which is the one who said his circle

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reversed rosary if you can't find the[br]target material in the compound

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dictionary you can still manually enter[br]the material because trimmed read all

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the target materials as a more biz we[br]can edit the target material as reward

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without considering details in the[br]crystal structure

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for example like to set the target[br]material as hafnium oxide first all add

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HFL in the tournament you click on Add[br]New elemental air and oxygen

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stoichiometry should be wanted to change[br]the Dead Sea value to the deaths of the

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you've had your mark side it's a[br]critical parameter make sure you put the

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correct value

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the density of hafnium oxide is nine[br]point six grams per cubic centimeter the

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with values the thickness of your target[br]material the unit of the thicknesses

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defaulters engstrom you can change units

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it's the special parameters for[br]simulation for example this value means

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to Syria simulation results at every ten[br]thousand islands since the software uses

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Monte Carlo simulation the number of[br]ions setting you is not related to the

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dose of ion implantation it's only[br]perimeter of the simulation the higher

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the number is the more precise the[br]result will be the phone numbers 999999

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you can increase the numbers you want in[br]this journal will keep the default

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number unchanged

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advantage of the ROC reason is that if[br]your computer acid daily shuts down and

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you still keep the latest results the[br]temporary file

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now that we've said all the initial[br]parameters click on save and run to

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begin the simulation what's the[br]simulation begins a new window popup

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this bone can pause and continue the[br]simulation process on the panel upper

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left corner it's the simulation[br]information completed means how many

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islands of implanted into the target the[br]position of every atom is decided by the

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Monte Carlo calculation theoretically[br]the program simulates where the Adams

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should stop when bombarded into the[br]target material

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the plot window displays the depth of[br]the target as the x coordinate you the

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ranges from 0 to 10,000 m for the[br]meaning other options you can learn by

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yourself through clicking the question[br]what they're like to mention his own

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distribution this feed you because this[br]figure displays the doping profile in

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real time

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excoriated as target depth the y[br]coordinate however is not concentration

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instead it's a ratio of concentration[br]overdose

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the reason is since the target materials[br]amorphis the distribution of the

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implanted ions is independent of dose[br]the concentration of doping will scale

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linearly according to the implant dose[br]therefore we need to do additional data

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processing when we get the final results[br]by multiplying the dose 31 ordained the

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final simulation results doping[br]concentration profile if we want to be

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more precise simulation result there's[br]another bremner we need to revise its

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real ion distribution

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it's really care about the info the red[br]peach there's a lot of blank info you

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$100 points in the final results which[br]means you'll get a lot of zero values in

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yrs old if the target depth range is too[br]large

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eighty percent of the final results will[br]be useless therefore we need to change

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the parameters in the plot window change[br]trim you can see some of the parameters

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turn yella those of the values you can[br]change during the simulation including

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element energy and angle the parameters[br]we need a change in the plot by

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referring to the ion distribution figure[br]will see that the valid data and around

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3000 Xtra

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now click on and edit restart the[br]simulation click on the Continue button

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I and distribution you'll see useful[br]data points cover almost the whole

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target

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the XY longitudinal for use the[br]two-dimensional distribution of the data

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point meanwhile I distribution figure is[br]one-dimensional distribution normally we

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only need one dimensional distribution[br]of a doping profile

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color of the bar changes from green to[br]red simulation to lend to make the

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simulation quicker we can simply close[br]windows we don't need now the

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simulations finished with the simulation[br]finishes the program will pop up window

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to let you see the result you[br]accidentally closed the window you can

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see the result by clicking on FB

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you can also verify the simulation[br]results by opening the ion distribution

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you can see that the doping profile used[br]mood which means we ventured enough

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numbers if you find that you don't[br]profiles roth probably need to increase

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the IR number next time you do the[br]simulation

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on any money but it makes no difference[br]to use the directory that you want to

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see the results in Annecy within the[br]installation folder

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was during the installation folder

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far as they're just generate range and[br]$80 these are the profiles they can be

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imported into cross-legged software

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he doesn't use the information to the[br]simulation process including energy and

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target materials the final simulation[br]result of doping profile is saved in the

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range text boulder you can see the[br]dublin-born calls you when using the

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data don't forget that the value newborn[br]column is not borne concentration to 10

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concentration that you need to multiply[br]those values the dose that you want

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therefore by using ion implantation[br]simulation we have 10 doping profiles

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that then may be used in and imported[br]into Crossley and that about wraps up

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bertram tutorial don't forget to check[br]out our other software tutorials and on

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behalf of cross late software have a[br]good one