[Script Info] Title: [Events] Format: Layer, Start, End, Style, Name, MarginL, MarginR, MarginV, Effect, Text Dialogue: 0,0:00:00.00,0:00:06.37,Default,,0000,0000,0000,,Welcome everybody my name is Stan and on\Nbehalf of Crosslight software Dialogue: 0,0:00:06.37,0:00:11.38,Default,,0000,0000,0000,,Ill be giving you a tutorial on TRIM.\NTRIM is thecalculation part of the software package Dialogue: 0,0:00:11.38,0:00:19.40,Default,,0000,0000,0000,,SRIM. It's mainly used to calculate dopant\Nprofiles after ion implantation \N Dialogue: 0,0:00:19.40,0:00:21.98,Default,,0000,0000,0000,,these dopant profiles can then be used by Crosslight\Nsoftware Dialogue: 0,0:00:21.98,0:00:24.98,Default,,0000,0000,0000,,trip is a Monte Carlo simulation Dialogue: 0,0:00:24.98,0:00:27.85,Default,,0000,0000,0000,,It treats all the target\Nmaterials amorphous. Dialogue: 0,0:00:27.85,0:00:30.85,Default,,0000,0000,0000,,In most cases \Nthe simulation results of trim Dialogue: 0,0:00:30.85,0:00:35.35,Default,,0000,0000,0000,,fit the experiments \Nof crystal target very well Dialogue: 0,0:00:35.35,0:00:41.18,Default,,0000,0000,0000,,let's begin our tutorial Dialogue: 0,0:00:41.18,0:00:51.48,Default,,0000,0000,0000,,first of all we need to log into the\Nofficial site of SRIM, www.SRIM.org Dialogue: 0,0:00:51.48,0:00:58.61,Default,,0000,0000,0000,,Then click download SRIM 2013 Dialogue: 0,0:00:58.61,0:01:01.61,Default,,0000,0000,0000,,there's two versions of SRIM standard and Dialogue: 0,0:01:01.61,0:01:13.61,Default,,0000,0000,0000,,professional for this tutorial we need\Nthe standard version Dialogue: 0,0:01:13.61,0:01:19.68,Default,,0000,0000,0000,,instructions for installation are on this\Nwebsite It's pretty straightforward let's Dialogue: 0,0:01:19.68,0:01:23.34,Default,,0000,0000,0000,,follow the instructions Dialogue: 0,0:01:23.34,0:01:30.79,Default,,0000,0000,0000,,first let's put the installation program\Non the desktop setup a new file and Dialogue: 0,0:01:30.79,0:01:42.60,Default,,0000,0000,0000,,name it as a SRIM 2013 Dialogue: 0,0:01:42.60,0:01:45.60,Default,,0000,0000,0000,,Then move the installation\Nprogram to the folder and rename it Dialogue: 0,0:01:45.60,0:02:00.00,Default,,0000,0000,0000,,We're gonna call it SRIM-2013.exe Dialogue: 0,0:02:00.00,0:02:06.70,Default,,0000,0000,0000,,now Let's run the installation the program\Nis actually a compressed package Dialogue: 0,0:02:06.70,0:02:18.72,Default,,0000,0000,0000,,installation process is only an\Nextraction Dialogue: 0,0:02:18.72,0:02:26.36,Default,,0000,0000,0000,,right now the stream programs installed\Nlet's open the executable file this Dialogue: 0,0:02:26.36,0:02:33.31,Default,,0000,0000,0000,,brings up the starting interface of this\Nroom Dialogue: 0,0:02:33.31,0:02:42.70,Default,,0000,0000,0000,,since we only used trim trim calculation\Nunfortunately our program Ashley froze Dialogue: 0,0:02:42.70,0:02:49.96,Default,,0000,0000,0000,,you it's a small bug this program the\Ndevelopers of this program only using Dialogue: 0,0:02:49.96,0:02:55.11,Default,,0000,0000,0000,,list for non unicode program if your\Ncomputer system is not in English it'll Dialogue: 0,0:02:55.11,0:03:04.14,Default,,0000,0000,0000,,stop like this in order to solve this\Nproblem first of all when you close the Dialogue: 0,0:03:04.14,0:03:19.83,Default,,0000,0000,0000,,program Dialogue: 0,0:03:19.83,0:03:27.33,Default,,0000,0000,0000,,right let's bring up the control panel\Nnow we're looking for regional language Dialogue: 0,0:03:27.33,0:03:38.96,Default,,0000,0000,0000,,under the panel Administrative click on\Nthe button of change system locale to Dialogue: 0,0:03:38.96,0:03:47.65,Default,,0000,0000,0000,,change the current language for non\Nunicode programs you can see I chose Dialogue: 0,0:03:47.65,0:03:54.15,Default,,0000,0000,0000,,language as Chinese previously therefore\NI need to change it to English let's use Dialogue: 0,0:03:54.15,0:04:05.80,Default,,0000,0000,0000,,English Canada Dialogue: 0,0:04:05.80,0:04:20.51,Default,,0000,0000,0000,,change the system wavelet to restart the\Ncomputer click on restart Dialogue: 0,0:04:20.51,0:04:28.80,Default,,0000,0000,0000,,after restarting your computer lets\Nreopen the program Dialogue: 0,0:04:28.80,0:04:38.63,Default,,0000,0000,0000,,calculation if everything's ok we should\Nsee the setup window of true Dialogue: 0,0:04:38.63,0:04:45.29,Default,,0000,0000,0000,,of Windows divided into three parts\Nfirst part is I R data second part is Dialogue: 0,0:04:45.29,0:04:50.79,Default,,0000,0000,0000,,target Dadda the last as the special\Nparameters for the simulation and the Dialogue: 0,0:04:50.79,0:04:59.47,Default,,0000,0000,0000,,buns from running saving elixir chura\Nlet's begin with iron in the ion Dialogue: 0,0:04:59.47,0:05:04.86,Default,,0000,0000,0000,,dissociation you can choose the type of\Ntrim calculation for ion implantation or Dialogue: 0,0:05:04.86,0:05:09.37,Default,,0000,0000,0000,,just use the default option I own\Ndistribution and quick calculation of Dialogue: 0,0:05:09.37,0:05:14.84,Default,,0000,0000,0000,,damage since is the fastest oh we're\Nonly too much detail the implantation Dialogue: 0,0:05:14.84,0:05:22.38,Default,,0000,0000,0000,,but only the file open distribution\Nprofile click on the PTT button he Dialogue: 0,0:05:22.38,0:05:27.49,Default,,0000,0000,0000,,reaches the implant ion know that this\Nprogram can only choose a single element Dialogue: 0,0:05:27.49,0:05:32.63,Default,,0000,0000,0000,,for implantation we can't choose\Nmolecules Dialogue: 0,0:05:32.63,0:05:40.17,Default,,0000,0000,0000,,chose boron for demonstration purposes Dialogue: 0,0:05:40.17,0:05:47.53,Default,,0000,0000,0000,,four parameters of Ireland outta atomic\Nnumber in masses default as employers Dialogue: 0,0:05:47.53,0:05:57.51,Default,,0000,0000,0000,,oil change implantation energy and angle\Nas we want for energy its default as 10 Dialogue: 0,0:05:57.51,0:06:08.18,Default,,0000,0000,0000,,killer electron volts you all changed to\Nfifty years the ion implantation nail Dialogue: 0,0:06:08.18,0:06:17.20,Default,,0000,0000,0000,,that deviates from the normal direction\Nof the target surface the second part Dialogue: 0,0:06:17.20,0:06:22.95,Default,,0000,0000,0000,,now is the target of the default target\Nmaterial the program is set as a single Dialogue: 0,0:06:22.95,0:06:32.32,Default,,0000,0000,0000,,layer Dialogue: 0,0:06:32.32,0:06:37.85,Default,,0000,0000,0000,,if your target misuse multi-layered\Nclick on Add new layer you can edit the Dialogue: 0,0:06:37.85,0:06:46.55,Default,,0000,0000,0000,,landing here for simplicity only set one\Nlayer but you can certainly multiple Dialogue: 0,0:06:46.55,0:06:48.98,Default,,0000,0000,0000,,layers if you need to Dialogue: 0,0:06:48.98,0:06:57.52,Default,,0000,0000,0000,,on the road side of this section it's\Nthe setting for target material if you Dialogue: 0,0:06:57.52,0:07:03.56,Default,,0000,0000,0000,,told your materials a single element Li\Nsilly comment click on the PPT buns and Dialogue: 0,0:07:03.56,0:07:10.44,Default,,0000,0000,0000,,cheese silicon Dialogue: 0,0:07:10.44,0:07:15.20,Default,,0000,0000,0000,,however if your target material is\Ncomplicated first you can search from Dialogue: 0,0:07:15.20,0:07:20.24,Default,,0000,0000,0000,,the compound dictionary the program has\Nincluded various types of target Dialogue: 0,0:07:20.24,0:07:25.67,Default,,0000,0000,0000,,materials for example under common\Nimplementation compounds there are many Dialogue: 0,0:07:25.67,0:07:41.90,Default,,0000,0000,0000,,types of class there are also many types\Nof metals and alloys Dialogue: 0,0:07:41.90,0:07:48.72,Default,,0000,0000,0000,,I chose gallium crystal you can see the\Nmessage code you it's also a small bug Dialogue: 0,0:07:48.72,0:07:57.76,Default,,0000,0000,0000,,true but don't worry about that will\Nskip click on Add occur where you'll see Dialogue: 0,0:07:57.76,0:08:03.32,Default,,0000,0000,0000,,the elements you delete the first column\Nwhich is the one who said his circle Dialogue: 0,0:08:03.32,0:08:10.95,Default,,0000,0000,0000,,reversed rosary if you can't find the\Ntarget material in the compound Dialogue: 0,0:08:10.95,0:08:16.18,Default,,0000,0000,0000,,dictionary you can still manually enter\Nthe material because trimmed read all Dialogue: 0,0:08:16.18,0:08:20.91,Default,,0000,0000,0000,,the target materials as a more biz we\Ncan edit the target material as reward Dialogue: 0,0:08:20.91,0:08:31.70,Default,,0000,0000,0000,,without considering details in the\Ncrystal structure Dialogue: 0,0:08:31.70,0:08:39.92,Default,,0000,0000,0000,,for example like to set the target\Nmaterial as hafnium oxide first all add Dialogue: 0,0:08:39.92,0:08:51.48,Default,,0000,0000,0000,,HFL in the tournament you click on Add\NNew elemental air and oxygen Dialogue: 0,0:08:51.48,0:09:02.98,Default,,0000,0000,0000,,stoichiometry should be wanted to change\Nthe Dead Sea value to the deaths of the Dialogue: 0,0:09:02.98,0:09:09.13,Default,,0000,0000,0000,,you've had your mark side it's a\Ncritical parameter make sure you put the Dialogue: 0,0:09:09.13,0:09:16.87,Default,,0000,0000,0000,,correct value Dialogue: 0,0:09:16.87,0:09:31.13,Default,,0000,0000,0000,,the density of hafnium oxide is nine\Npoint six grams per cubic centimeter the Dialogue: 0,0:09:31.13,0:09:35.80,Default,,0000,0000,0000,,with values the thickness of your target\Nmaterial the unit of the thicknesses Dialogue: 0,0:09:35.80,0:09:46.67,Default,,0000,0000,0000,,defaulters engstrom you can change units Dialogue: 0,0:09:46.67,0:09:54.31,Default,,0000,0000,0000,,it's the special parameters for\Nsimulation for example this value means Dialogue: 0,0:09:54.31,0:10:00.30,Default,,0000,0000,0000,,to Syria simulation results at every ten\Nthousand islands since the software uses Dialogue: 0,0:10:00.30,0:10:05.50,Default,,0000,0000,0000,,Monte Carlo simulation the number of\Nions setting you is not related to the Dialogue: 0,0:10:05.50,0:10:11.28,Default,,0000,0000,0000,,dose of ion implantation it's only\Nperimeter of the simulation the higher Dialogue: 0,0:10:11.28,0:10:21.14,Default,,0000,0000,0000,,the number is the more precise the\Nresult will be the phone numbers 999999 Dialogue: 0,0:10:21.14,0:10:31.64,Default,,0000,0000,0000,,you can increase the numbers you want in\Nthis journal will keep the default Dialogue: 0,0:10:31.64,0:10:33.64,Default,,0000,0000,0000,,number unchanged Dialogue: 0,0:10:33.64,0:10:38.52,Default,,0000,0000,0000,,advantage of the ROC reason is that if\Nyour computer acid daily shuts down and Dialogue: 0,0:10:38.52,0:10:55.42,Default,,0000,0000,0000,,you still keep the latest results the\Ntemporary file Dialogue: 0,0:10:55.42,0:11:01.22,Default,,0000,0000,0000,,now that we've said all the initial\Nparameters click on save and run to Dialogue: 0,0:11:01.22,0:11:09.56,Default,,0000,0000,0000,,begin the simulation what's the\Nsimulation begins a new window popup Dialogue: 0,0:11:09.56,0:11:19.11,Default,,0000,0000,0000,,this bone can pause and continue the\Nsimulation process on the panel upper Dialogue: 0,0:11:19.11,0:11:29.60,Default,,0000,0000,0000,,left corner it's the simulation\Ninformation completed means how many Dialogue: 0,0:11:29.60,0:11:34.45,Default,,0000,0000,0000,,islands of implanted into the target the\Nposition of every atom is decided by the Dialogue: 0,0:11:34.45,0:11:40.46,Default,,0000,0000,0000,,Monte Carlo calculation theoretically\Nthe program simulates where the Adams Dialogue: 0,0:11:40.46,0:11:50.48,Default,,0000,0000,0000,,should stop when bombarded into the\Ntarget material Dialogue: 0,0:11:50.48,0:11:56.51,Default,,0000,0000,0000,,the plot window displays the depth of\Nthe target as the x coordinate you the Dialogue: 0,0:11:56.51,0:12:06.52,Default,,0000,0000,0000,,ranges from 0 to 10,000 m for the\Nmeaning other options you can learn by Dialogue: 0,0:12:06.52,0:12:14.32,Default,,0000,0000,0000,,yourself through clicking the question\Nwhat they're like to mention his own Dialogue: 0,0:12:14.32,0:12:20.81,Default,,0000,0000,0000,,distribution this feed you because this\Nfigure displays the doping profile in Dialogue: 0,0:12:20.81,0:12:27.65,Default,,0000,0000,0000,,real time Dialogue: 0,0:12:27.65,0:12:39.56,Default,,0000,0000,0000,,excoriated as target depth the y\Ncoordinate however is not concentration Dialogue: 0,0:12:39.56,0:12:44.54,Default,,0000,0000,0000,,instead it's a ratio of concentration\Noverdose Dialogue: 0,0:12:44.54,0:12:50.58,Default,,0000,0000,0000,,the reason is since the target materials\Namorphis the distribution of the Dialogue: 0,0:12:50.58,0:12:56.50,Default,,0000,0000,0000,,implanted ions is independent of dose\Nthe concentration of doping will scale Dialogue: 0,0:12:56.50,0:13:06.79,Default,,0000,0000,0000,,linearly according to the implant dose\Ntherefore we need to do additional data Dialogue: 0,0:13:06.79,0:13:13.79,Default,,0000,0000,0000,,processing when we get the final results\Nby multiplying the dose 31 ordained the Dialogue: 0,0:13:13.79,0:13:20.89,Default,,0000,0000,0000,,final simulation results doping\Nconcentration profile if we want to be Dialogue: 0,0:13:20.89,0:13:27.23,Default,,0000,0000,0000,,more precise simulation result there's\Nanother bremner we need to revise its Dialogue: 0,0:13:27.23,0:13:34.26,Default,,0000,0000,0000,,real ion distribution Dialogue: 0,0:13:34.26,0:13:38.66,Default,,0000,0000,0000,,it's really care about the info the red\Npeach there's a lot of blank info you Dialogue: 0,0:13:38.66,0:13:51.33,Default,,0000,0000,0000,,$100 points in the final results which\Nmeans you'll get a lot of zero values in Dialogue: 0,0:13:51.33,0:13:55.90,Default,,0000,0000,0000,,yrs old if the target depth range is too\Nlarge Dialogue: 0,0:13:55.90,0:14:00.55,Default,,0000,0000,0000,,eighty percent of the final results will\Nbe useless therefore we need to change Dialogue: 0,0:14:00.55,0:14:12.42,Default,,0000,0000,0000,,the parameters in the plot window change\Ntrim you can see some of the parameters Dialogue: 0,0:14:12.42,0:14:17.86,Default,,0000,0000,0000,,turn yella those of the values you can\Nchange during the simulation including Dialogue: 0,0:14:17.86,0:14:27.80,Default,,0000,0000,0000,,element energy and angle the parameters\Nwe need a change in the plot by Dialogue: 0,0:14:27.80,0:14:33.95,Default,,0000,0000,0000,,referring to the ion distribution figure\Nwill see that the valid data and around Dialogue: 0,0:14:33.95,0:14:50.76,Default,,0000,0000,0000,,3000 Xtra Dialogue: 0,0:14:50.76,0:14:57.73,Default,,0000,0000,0000,,now click on and edit restart the\Nsimulation click on the Continue button Dialogue: 0,0:14:57.73,0:15:05.11,Default,,0000,0000,0000,,I and distribution you'll see useful\Ndata points cover almost the whole Dialogue: 0,0:15:05.11,0:15:12.50,Default,,0000,0000,0000,,target Dialogue: 0,0:15:12.50,0:15:17.53,Default,,0000,0000,0000,,the XY longitudinal for use the\Ntwo-dimensional distribution of the data Dialogue: 0,0:15:17.53,0:15:25.54,Default,,0000,0000,0000,,point meanwhile I distribution figure is\None-dimensional distribution normally we Dialogue: 0,0:15:25.54,0:15:39.34,Default,,0000,0000,0000,,only need one dimensional distribution\Nof a doping profile Dialogue: 0,0:15:39.34,0:15:50.83,Default,,0000,0000,0000,,color of the bar changes from green to\Nred simulation to lend to make the Dialogue: 0,0:15:50.83,0:16:00.51,Default,,0000,0000,0000,,simulation quicker we can simply close\Nwindows we don't need now the Dialogue: 0,0:16:00.51,0:16:05.89,Default,,0000,0000,0000,,simulations finished with the simulation\Nfinishes the program will pop up window Dialogue: 0,0:16:05.89,0:16:10.12,Default,,0000,0000,0000,,to let you see the result you\Naccidentally closed the window you can Dialogue: 0,0:16:10.12,0:16:15.99,Default,,0000,0000,0000,,see the result by clicking on FB Dialogue: 0,0:16:15.99,0:16:21.29,Default,,0000,0000,0000,,you can also verify the simulation\Nresults by opening the ion distribution Dialogue: 0,0:16:21.29,0:16:28.39,Default,,0000,0000,0000,,you can see that the doping profile used\Nmood which means we ventured enough Dialogue: 0,0:16:28.39,0:16:36.52,Default,,0000,0000,0000,,numbers if you find that you don't\Nprofiles roth probably need to increase Dialogue: 0,0:16:36.52,0:16:47.76,Default,,0000,0000,0000,,the IR number next time you do the\Nsimulation Dialogue: 0,0:16:47.76,0:16:54.69,Default,,0000,0000,0000,,on any money but it makes no difference\Nto use the directory that you want to Dialogue: 0,0:16:54.70,0:17:15.72,Default,,0000,0000,0000,,see the results in Annecy within the\Ninstallation folder Dialogue: 0,0:17:15.72,0:17:23.18,Default,,0000,0000,0000,,was during the installation folder Dialogue: 0,0:17:23.18,0:17:31.25,Default,,0000,0000,0000,,far as they're just generate range and\N$80 these are the profiles they can be Dialogue: 0,0:17:31.25,0:17:36.49,Default,,0000,0000,0000,,imported into cross-legged software Dialogue: 0,0:17:36.49,0:17:40.95,Default,,0000,0000,0000,,he doesn't use the information to the\Nsimulation process including energy and Dialogue: 0,0:17:40.95,0:17:47.29,Default,,0000,0000,0000,,target materials the final simulation\Nresult of doping profile is saved in the Dialogue: 0,0:17:47.29,0:17:54.22,Default,,0000,0000,0000,,range text boulder you can see the\Ndublin-born calls you when using the Dialogue: 0,0:17:54.22,0:18:00.52,Default,,0000,0000,0000,,data don't forget that the value newborn\Ncolumn is not borne concentration to 10 Dialogue: 0,0:18:00.52,0:18:04.81,Default,,0000,0000,0000,,concentration that you need to multiply\Nthose values the dose that you want Dialogue: 0,0:18:04.81,0:18:11.49,Default,,0000,0000,0000,,therefore by using ion implantation\Nsimulation we have 10 doping profiles Dialogue: 0,0:18:11.49,0:18:17.98,Default,,0000,0000,0000,,that then may be used in and imported\Ninto Crossley and that about wraps up Dialogue: 0,0:18:17.98,0:18:23.17,Default,,0000,0000,0000,,bertram tutorial don't forget to check\Nout our other software tutorials and on Dialogue: 0,0:18:23.17,0:18:26.49,Default,,0000,0000,0000,,behalf of cross late software have a\Ngood one