- 
35c3 pre-roll music 
- 
Herald: The next talk is the talk on
 LibreSilicon project that's meant to
 
- 
create a free and open silicon
 manufacturing process. And our speakers
 
- 
today are leviathan, chipforge and
 Andreas Westerwick, creators of
 
- 
LibreSilicon. So let's give them a firm
 round of applause and please welcome them.
 
- 
applause 
- 
David: Oh, it works, ok. That's problem.
 That's what essentially is all this fuss
 
- 
about is actually a description of how
 we... what this waver means and where we
 
- 
will go with it. And yeah, I give now
 already over to Hagen which already starts
 
- 
elaborating on the basic conceptional
 things.
 
- 
Hagen: OK. Hello everybody. Hope you have
 a fresh mind. It could be heavy. OK. Let's
 
- 
start. What we are. Last year David was
 involved at the project to looking for
 
- 
free silicon, just a way to manufacture
 his own chips and figured out it's
 
- 
difficult. You need a lot of contracts for
 that, NDAs (non-disclosure agreements). So
 
- 
he looked around and find a clean room. We
 had to come in and say, OK, we can rent
 
- 
it. Then he entered a scene on the last
 Congress - a lightning talk - and said, I
 
- 
like to do that. And I wasn't in the
 auditorium there, but a guy told me later,
 
- 
OK, look at this lightning talk. It's very
 interesting. You'd already doing chips. So
 
- 
I entered in sees it or seen the talk
 recording and see it. Nice idea, I will do
 
- 
that too. And the whole year we meet us by
 mumble. It's just a thing of distance you
 
- 
know. David is located in Hong Kong. The
 clean room is there. And I worked from
 
- 
Germany. So we exchanged e-mails. We
 talked on a mailing list. We built up a
 
- 
small community for that and we had a
 first hackathon just to figure it out,
 
- 
what we are doing with the tools, which
 tools are available how we can use them,
 
- 
are they usable at all or not. And this
 was in May and during the process the
 
- 
group wised up and already two of us got
 their qualification to enter the clean
 
- 
room. The Hong Kong University is a
 little bit strict in that. You have to sit
 
- 
there in the courses, you have to do exams
 and if you're fine with the exam then you
 
- 
get the permissions to go in. So Victor
 which is on the most left and David on
 
- 
the most right, they have the
 qualification for that and they
 
- 
manufacture our wafer which you have seen
 there. It's a small one, but it's the
 
- 
first stuff we have, right? OK. The basic
 points, what we are doing. We are using
 
- 
a quite, let's see, old technologies from
 the 80s. It's one micrometer feature size.
 
- 
It means a gate length of the transistor
 has one micron. It's not comparable with
 
- 
all the processors you can buy now. It's
 quite old, it's really stuff from the 80s.
 
- 
But we do it in a new way. We don't use
 the technology from the 80s. We do it with
 
- 
the knowledge and all the experience from
 newer technology. Doing it again and using
 
- 
some steps which are not so common, well,
 it wasn't common in the 80s. So why one
 
- 
micron? One micron also means that the
 transistors are very robust against five
 
- 
volt. Five volt was a usual supply voltage
 in the 80s, 90s and something like that.
 
- 
Now the supply voltage is going down,
 down to less than one volt but for
 
- 
tinkerers, for hobbyists, for makers, it's
 a nice value because older stuff, many
 
- 
boards are still working with five volts
 and we're able to handle this voltage. So
 
- 
we have a twin-well process; usually in
 the 80s there was just one well. OK, we
 
- 
have to hurry up. We have three metal
 layers. We have interesting additions and
 
- 
we are suitable for low tech. Ghetto tech,
 I would say. You can use it without
 
- 
sophisticated equipment. We can analog
 stuff and so on and analog stuff means you
 
- 
don't need small structures. OK. Areas
 where we have to work on. First, the
 
- 
process. It's almost done. You have
 figured out it works with measuring. OK,
 
- 
the next stuff: we need the tools. But the
 tools are also very old and mostly not
 
- 
usable. We have to deal with that stuff.
 We have to rethink the tooling for that
 
- 
and we need standard cells. That's my
 task. OK, so a couple of thoughts about
 
- 
standard cells. They are very common.
 Usually, if you have a need to translate
 
- 
your Verilog or VHDL and to bring it on a
 silicon you need small gates. NAND gates,
 
- 
OR gates and so on. But these gates need a
 lot of representation, the combinatorial
 
- 
sequencing. So OK. These are typical
 cells. Just a couple of them. But imagine,
 
- 
we need much much more and there's design
 goals for the standard cells as we need
 
- 
almost complete possibilities. If you have
 just this small selection of cells, the
 
- 
netlist becomes huge and every gate in the
 netlist also means a dedicated delay. If
 
- 
you have long chains we have a long delay
 so that our operating frequency goes down.
 
- 
So if you have more complex gates we are
 better but doing all this stuff is heavy,
 
- 
but we like to be lower power. That means
 our cells have to be consumption less
 
- 
power than usual. We want to be fast but
 yes, of course, it doesn't fit all
 
- 
together. OK. So we need it for
 simulation. We need it for synthesis. We
 
- 
need it for timing. As you can see
 everywhere on the slides and, of course,
 
- 
documentation. That's a lot of work. We
 are a small team. I am the only guy who is
 
- 
dealing with the standard cells it's
 usually our teams also are doing that. So
 
- 
OK, we need a tool for that which does all
 the stuff for us. And this cell generator,
 
- 
I called it popcorn, because I put in some
 corn and it rised up with the heat. So we
 
- 
can get all the representation. So
 currently I have this tool on the
 
- 
repository which is Tcl which does some
 stuff I like, I need, but not all. But it
 
- 
already seems very ugly. So for me I like
 to rewrite that but I don't figure out
 
- 
currently which language I like to use for
 that. Next time it could be rust, it could
 
- 
be scheme or something like that. We need
 another language for that. So if someone
 
- 
would help - please, but that's the next
 task, if you have the wafer done
 
- 
completely and measured. OK. That's a link
 for the repository where you can look at
 
- 
the current status and there's a wiki
 where I like to describe why I'm doing
 
- 
what in which way. But yes, we have to do
 a lot more. OK.
 
- 
Andreas: OK. Hi. I take a look at the
 current tooling that exists like
 
- 
layouting, place and route to minimize the
 yield on the wafer. And obviously because
 
- 
this is the LibreSilicon project we look
 at open source tools. So we have Yosys and
 
- 
graywolf, qrouter and several other FPGA
 routers that exist. Yosys is pretty good.
 
- 
We can probably use this for the
 synthesis. But the other tools, they lack
 
- 
very critical qualities for this... for
 silicon because they, for example, they
 
- 
are part of qflow which is an FPGA
 workflow. So the graywolf tool, it
 
- 
originates in academia. It's, like, it's
 many decades old. It comes with some very
 
- 
good ideas, for example simulated
 annealing which is a meta-heuristic
 
- 
you can use to solve NP-hard problems, but
 it's only one of the many choices you can
 
- 
make to solve the extra hard problems. But
 it also comes with bad implementation, for
 
- 
example inline syscalls is a very bad
 idea. And it's also written in C and blah
 
- 
blah, OK. Qrouter is actually... it's
 pretty good. It started in 2011 by Tim
 
- 
Edwards. It's widely used for, by hobbyists
 and enthusiasts to route for FPGAs. But
 
- 
it's not ready for silicon and it's
 especially not ready for our LibreSilicon
 
- 
process which would require us to to write
 a lot of C code for Qrouter. Also
 
- 
parallelism apparently is not in scope, so
 I mean if we want to scale up, for example
 
- 
place and route in the cloud or whatever or
 use modern CPU architectures, we are stuck
 
- 
with sequential routing which is pretty
 bad. Also it lacks a very important
 
- 
aspect, in my opinion, which is formal
 correctness. So when we produce wafers in
 
- 
the fab we want to make sure that they
 don't blow up in our faces. This is why we
 
- 
need some form of proof that our
 algorithms are correct and therefore the
 
- 
result is correct. There are also other
 productive tools that are proprietary
 
- 
where we can look at, but we cannot use it
 or fork it or whatever but we can learn
 
- 
from the research that has been done, for
 example BonnRoute. BonnRoute is used by
 
- 
IBM. The Cadence suite, I believe, is used
 by Intel and the Alliance tools is French
 
- 
academia. Very UNIXy, I mean it's a very
 it's a very large set of small tools that
 
- 
convert different file formats to another.
 I mean, maybe you encountered this problem
 
- 
before when you did some hardware design;
 you have many different file formats that
 
- 
all don't play together very well. So you
 have tools like X to Y which convert file
 
- 
format x to y. And you see when you want
 to place and route and layout a very very
 
- 
large chip, like a Very Large Silicon
 Integration, then this isn't even done,
 
- 
like, automatically by tools. This is done
 with manpower. When you look at a very
 
- 
large chip done by Intel or IBM. So this
 is an example of a very very large chip as
 
- 
you can see. I mean do you think this has
 been done by automation like industry 5.0?
 
- 
No. This is all manpower and a lot
 of manpower. Which we don't have, The
 
- 
LibreSilicon project at the moment. So
 this is the state of the art is like
 
- 
okay the manpower thing is one aspect but
 the other thing is so what you do is
 
- 
you do placing and routing at different
 steps at the design process so you do
 
- 
placing for a very large chip, floor
 planning and then you do a global routing
 
- 
which is you /can imagine it like
 routing along a rough chessboard. And
 
- 
after that you do a very detailed
 routing where all the different
 
- 
constraints regarding your technology come
 into play and so again the formal
 
- 
correctness aspect. So you have some
 imperative algorithm that you cannot prove
 
- 
will blow up. And it's also not a very
 parallel code. So you're still stuck with
 
- 
the sequential nature of the code and you
 have no parallelism. What we propose is to
 
- 
not place and route for large chip but
 to decompose the large chip into much
 
- 
smaller units like a component hierarchy
 or a sub cell hierarchy and then place and
 
- 
route the small chips at the same time and
 then reuse the small units in larger
 
- 
units. So you get an evaluation tree you
 can work on and compile just the
 
- 
components you need. Also we propose
 satisfiability modulo theory solvers so we
 
- 
can have some first order logic where we
 can have constraints on the components,
 
- 
how they are placed for example they
 don't - they must not overlap.
 
- 
Let's take the most simple example I will
 show you like later. And also we want to
 
- 
achieve parallel or declarative code. So
 as you can see we have some, we have many
 
- 
disagreements with academia and industry
 which work very well together for example
 
- 
when you want to study semiconductor
 design you have to sign some NDAs with IBM
 
- 
or Intel to do that. So, they say
 placement and routing or floor planning
 
- 
and routing are different problems and
 they need to be solved at different times
 
- 
in the process. And then all the
 components can be registers or NAND gates
 
- 
it does matter they all treated the same.
 No it only matters that uh the floor
 
- 
planning stand first and then the routing
 the closed routing then a detailed
 
- 
routing. What we propose is that place
 and route is actually the same problem and
 
- 
that registers are different from full
 adders. Okay. So the geographical
 
- 
partitioning of a wafer is called floor
 planning or the placing step. And this
 
- 
results in a cut tree. So this is how they
 do routing hierarchies. They just divide
 
- 
the wafer into smaller pieces and then do
 the following steps based on this
 
- 
placement. What we want to do is have
 subcell hierarchies and those sub cells
 
- 
they are either explicit like they are
 explicitly developed for example the
 
- 
rocket ship is very modular and it has
 many explicit verilog modules you can use
 
- 
and place and route that and then reuse
 it. And it also has implicit sub cells like
 
- 
for example most of the time. For example
 you have a full adder it obviously is
 
- 
composed of one bit adders so you can
 place and route one bit adder and then
 
- 
place and route based on the one bit
 adders that you artfully placed and routed.
 
- 
And as a result you get a full adder.
 That's just one example but I will show
 
- 
you a tree, a few slides. So there you see
 parallelism. There's something very
 
- 
important for us. BonnRoute allocates a
 lot of research to have some mathematical
 
- 
model for concurrency and shared memory
 models. qrouter, which is the open source
 
- 
alternative, has none. I mean that's
 apparently not in scope. And what I
 
- 
propose for the LibreSilicon compiler is
 the map and reduce approach. And as I've
 
- 
mentioned you get explicit subcell
 hierarchies through high modularization.
 
- 
That is done by the developers and
 you also get implicit subcell hierarchies
 
- 
by compression-like algorithms that exline
 as opposed to inline the registers or one
 
- 
bit adders. And this is also about
 preserving these newfound hierarchies in
 
- 
the compiler interfaces so you don't end
 up inlining them again because this is
 
- 
not a Von Neumann architecture where it
 would make sense to inline a lot of code.
 
- 
So the code runs on the stack and the
 level 1 cache. This is about reusing
 
- 
components. Okay. So this is a part of the
 rocket ship, the system bus is one
 
- 
component of a very modular chip rocket
 ship. And as you can see it is composed of
 
- 
several simple lazy modules and those
 simple modules are again composed of other
 
- 
components. And then you have a lot of
 queues and this number on the left says
 
- 
how many times it's been used. For example
 queue 15 is used 5 times in the
 
- 
AXI4Deinterleaver and this is only the
 explicit hierarchy that is declared by the
 
- 
developer. Okay. Now when you apply some
 compression-like algorithms you can
 
- 
actually gain, you can get more leaves so
 you can be even more modular. For example
 
- 
queue 1 is composed of several implicit
 modules and you can see one queue is even
 
- 
reused seven times. So you just route,
 place and route these green leaves like
 
- 
once and then you can reuse it in the
 queue 1 and everywhere where queue 1 is
 
- 
reused some at some other point in the
 chip. Now I want to state a very simple
 
- 
optimization problem. What we need for
 the process is to have components and
 
- 
wires that connect the components or nets
 and these nets and components are actually
 
- 
rectilinear geometries, the components
 shall not overlap and the nets shall
 
- 
overlap with the respective pins they are
 supposed to connect. The minimizing goals
 
- 
of this optimization problem is layout
 area, which is the most critical one
 
- 
because this is what maximizes yield, the
 maximum wire length because it's about
 
- 
resistance, the wire count you want to
 keep very small but you want to allow for
 
- 
wires. The crossing number is a
 computational thing. It doesn't really
 
- 
matter for the implementation on the
 silicon and you also want maybe you want
 
- 
to minimize the wire jogs which is bends
 in the wire. So to to solve optimization
 
- 
problems in 2018 maybe you want to use an
 abstraction from the SAT solvers. You used
 
- 
to know academia came up with some pretty
 neat theory is called satisfiability
 
- 
modulo theories and you can just put some
 first order logic and give it to a solver.
 
- 
I've listed a few. For example ABC is used
 by Yosys and Z3 from Microsoft, also very
 
- 
promising product, but you can obviously
 choose from many products by academia and
 
- 
industry. Just a quick reminder what
 boolean satisfiability is: find
 
- 
assignments for all these six variables
 which are boolean so that the whole term
 
- 
is true. And now with SMT or
 satisfiability modulo theories you can do
 
- 
the same thing but now with integers and
 also more complex data types but integers
 
- 
are the most interesting. So let's do
 something with SMT. For example we have a
 
- 
component that is rectangular. And now you
 can see this is like a Cartesian
 
- 
coordinate system and you have the left
 bottom point which is x and y and then you
 
- 
have the right and the top point. And now
 if you for example have this problem that
 
- 
you don't want to have overlapping
 rectangles you can have a rectangle A and
 
- 
rectangle B and declare these coordinates
 and then have some proposition that shall
 
- 
be true and to have a proposition that
 says they shall not overlap is to say
 
- 
this. I mean it's actually the lower half
 that makes sure that they don't overlap
 
- 
and the upper half makes sure that the
 components actually have the right
 
- 
dimensions. Well in this example they
 obviously have the same dimensions the
 
- 
same components. And so you make sure
 that the left point of the second
 
- 
rectangle is right of the... Okay no,
 never mind. One last important point I
 
- 
want to make is that this this framework
 we want to create, it's not based on the
 
- 
inheritance model that we've seen in the
 process steps right now. But we want to
 
- 
combine the problems. For example the
 overlapping problem, the pin connect
 
- 
problem, and then arbitrary constraints
 that come up during the process
 
- 
development that Dave and Hagen will
 supply me with and I will formulate that
 
- 
in first order logic. And then this
 makes sure it's formally correct and it
 
- 
doesn't blow up. And as you can tell I
 mean I've combined many NP-hard
 
- 
problems at the same time but I think we
 can manage that if we have very small
 
- 
cells so I'd suggest we just stay here and
 don't do all this for very large chips but
 
- 
reuse small chips and then reuse the small
 chips in other small chips. The silicon
 
- 
compiler is one half of maximizing
 yields. And the other half is to get the
 
- 
process right so to get the process right,
 we have David and Victor. So please.
 
- 
David: So thanks for the handover. So very
 first. There's a lot of questions why Hong
 
- 
Kong. So one thing why this is a
 really suitable place to do that is
 
- 
because of history like the epic Commodore
 64 has been made in Hong Kong. Then the
 
- 
chips in the first Macintosh have been
 made in Hong Kong and all of these
 
- 
manufacturing lines. Some of them at least
 one is still available. So also there is a
 
- 
very advanced laboratory. That's the NFF,
 Nano Fabrication Facility in
 
- 
Clearwater Bay and they let us kindly use
 their equipment to develop this process.
 
- 
Also one of the sectors I mentioned
 before, RCL semiconductors, they're really
 
- 
open to introduce LibreSilicon in their
 mass-manufacturing lines: one in Shenzen,
 
- 
one in Tai Po. So in conclusion of that we
 have advanced R&D labs there. There is
 
- 
factories available. We can easily export
 it to here over channels which already
 
- 
exist. Right. And also in general it's
 just more relaxed over there. And I don't
 
- 
like minus degrees. So our process is a
 little bit of a monster. So it makes sense
 
- 
to tackle that one by one so we are right
 now feeling ourselves upwards to get the
 
- 
standard CMOS debugged, final with
 optimized frequencies there. But we
 
- 
already have on the Pearl River, I've shown
 you, we already have test structures for
 
- 
high voltage MOSFETS, B junction
 transistors, Zener diodes, even flash,
 
- 
resistors, and caps. So it's only a
 question of effort I guess in the next few
 
- 
months to get that working. When we
 designed the process like, how it usually
 
- 
works when you make a process, you look at
 the machines you have availlable, what can
 
- 
these machines do, optimum operation range
 and then you look what substrate, what
 
- 
material you have available and then you
 start tinkering you own little proprietary
 
- 
process. That's how fabs do that. And we
 said, OK, well, to the point where we look
 
- 
at the machines - what can they do? We
 do the same, but afterwards we look that
 
- 
it's portable. Not specific to the
 equipment. So just because we have certain
 
- 
machines which can do awesome things, but
 are really exotic, doesn't mean we have to
 
- 
use them. So we avoid exalting machines so
 that it's as portable as possible. And we
 
- 
also try to use wet etching whenever
 possible in order to make sure that you
 
- 
even can build it in a basement. And here
 Evan Heisenberg may be interested now in,
 
- 
you know, changing business into a less
 dangerous business. And, yeah, they can't
 
- 
be leading the innovation hub Hamburg I've
 seen, like this improvised clean room with
 
- 
just a diffusion furnace. So, that's a
 cross-section of the... it's not
 
- 
finalised, but you see a cross section
 theoretical that's... by the way, you can
 
- 
find it on GitHub as well. It's all in the
 publications, everything we develop, all
 
- 
the measurement data, all this on GitHub.
 So that's actually the layout of these
 
- 
little squares here on the wafer. You
 see the apple in the middle. It's just in
 
- 
this year. That's, uh, it's nice. I have a
 Python script in the GDS2 generator
 
- 
tool folder for Python and you
 can take any png or anything and just
 
- 
convert it into layout format, so you can
 put your own pictures onto the metal free
 
- 
layer. So in case you already have
 interest into making little trips also.
 
- 
It's also possible to make, like, ear
 rings also with ... We don't care as long
 
- 
as there are 4 more millimeters on the
 silicon. You can put pictures on the
 
- 
silicon. So that was the Pearl River
 right. And the Pearl River fulfills the
 
- 
function for us at the moment to debug all
 the features of this LibreSilicon process.
 
- 
Then the next thing we have to use it to
 calibrate new foundries so now, we
 
- 
developed it at the NFF in Clearwater Bay
 right. And afterwards we go over to HQ
 
- 
with, to the RCL guys in Tai Po, and they
 have the machines and then we have to pipe
 
- 
the Pearl River layout through there as
 well and repeat that process over and over
 
- 
again until the measurement data, like
 the frequent, the you know the Beta
 
- 
depending on Omega of the transistors and
 the resistance of the wires and everything
 
- 
kind of is the same as at NFF so that you
 can basically, as I mentioned before one
 
- 
of the design concerns is portability
 that you can basically prototype a chip
 
- 
at the NFF and then produce it in RCL or
 in maybe some other fab in Shenzhen or
 
- 
whatever. And so and if there are new
 features coming out which also make a new
 
- 
release of the Pearl River test waver and
 we give that around they push it to GitHub
 
- 
and people can introduce and calibrate the
 process to support the new feature. And so
 
- 
that's how does that work. So usually,
 typically you have something like a photo
 
- 
mask like here. I didn't bring that one
 because it's in a clean room there and the
 
- 
dust might scratch my micro structures on
 there. So also afterwards I have to clean
 
- 
it for half an hour and when I come back
 to Hong Kong from here I'm so jetlagged I
 
- 
just want to get started again, not wait
 for the mask.
 
- 
But there's a picture.
 And these masks,
 
- 
usually a stepper/aligner specific. If you
 don't have a stepper then you need to make
 
- 
a direct transfer that means you actually
 have to put the chips in the size you
 
- 
want to expose them directly onto the
 mask. Then press the mask onto the
 
- 
photoresist, expose and develop. That's
 messy because you have to clean the mask
 
- 
all the time. And it really depends. So
 actually you can do exposure even without
 
- 
a stepper. So we actually really could do
 it also there in this university lab in
 
- 
Hamburg. So all you need is a new UV
 light. laugs So we have a little bit more
 
- 
advanced tech in Hong Kong. So we have
 here an SVG coater, this baby dispenses
 
- 
automatically HPR 504, a resist. So we
 actually just have to put in the left, you
 
- 
see the cassette slot. So you put there
 like twenty five wavers or so and then you
 
- 
have a receive slot and put another
 cassette there and it just starts sucking
 
- 
in the wafers one by one, puts primer on
 it, soft bakes it, and easy. Then you
 
- 
expose it, develop it, hard bake it,
 chilled. We have two types of resist actually
 
- 
and the 6400L for the implantation
 unfortunately has to be put in manually.
 
- 
So it comes and it gives you 10 seconds
 to open the chamber and put the resist on
 
- 
it. In both cases however it doesn't
 really matter so much because the
 
- 
thickness of the resist is depending on
 the RPMs of the spin coating unit. So you
 
- 
just have to kind of put two thirds of the
 waver should be somehow covered with the
 
- 
resist and the excess resist goes away.
 But you have to control the RPMs because
 
- 
depending on when you do wet etching for
 instance and HPR 504 has to be enough
 
- 
thick because of selectivity, so that you
 don't etch and consume the polymer,
 
- 
the resist. So you have to make it thick enough
 that you don't have,
 
- 
you haven't consumed all the polymer before 
- 
you have etched your structures. And the
 same goes for the implantation because you
 
- 
need 6400L, this one can sustain higher
 temperatures so you can use an implanter.
 
- 
Now afterwards after exposure development
 it looks like that. That's an alignment
 
- 
cross for our optical stepper and for
 instance that's our ring oscillator. So
 
- 
it's one of the structures on our Pearl
 River actually. So N well, P well. I have
 
- 
to hurry up, only 10 minutes or so. So
 that's a picture of the developing we have
 
- 
some P well mask developed so we have
 everywhere resist except in this little
 
- 
crosses and stripes there. That's there
 below is the silicon where we implant. The
 
- 
recipe is easy, first coat, expose the
 implant and then resist strip. Same for
 
- 
the P well and after the resist strip you
 can put it into a diffusion furnace in
 
- 
the atmosphere for like four hours. So
 where does the four hours come from? So
 
- 
we have the Fick's equation. And the
 Fick's equation is essentially in a
 
- 
similar shape like the laplace heat
 conduction equation, so to solve, there
 
- 
are already nice solutions for it. So for
 instance if you use boron or phosphorus
 
- 
which has the nice property that they have
 the same constants for this Dₑ. So if you
 
- 
have the same temperature you basically
 have the same Dₑ for phosphorus and boron
 
- 
so you can implant them next to each
 other and then put them at once into the
 
- 
diffusion furnace and the wells are the
 same depth. So that's why these two
 
- 
materials are usually used for diffusion.
 So that's one of the solutions that you
 
- 
get, the surface for doping for the
 threshold equation which I also will rush
 
- 
through in a moment as well. The
 equations you see here with background
 
- 
doping it's a little bit much. As you have
 here this natural logarithm inside. But
 
- 
besides that you see this jump and that's
 how you essentially build a well, you have
 
- 
the background doping and you compensate
 the donors and acceptors with each other
 
- 
so that's what this absolute value of the
 difference means. So the threshold
 
- 
equation is pretty easy. And like
 basically mirrored for PMOS and NMOS that
 
- 
just like mirrored in the sense that one
 of the transistors as PMOS is built on a N
 
- 
well and NMOS is built on a P well. Right.
 And what essentially controls the
 
- 
threshold voltage, so the operational
 voltage, which usually in the standard
 
- 
CMOS is around 0.8 respectively minus
 0.8. That's doping here like the donars
 
- 
respectively acceptors and the q as
 usually that's the oxide charge. This is
 
- 
usually a process specific constant but
 that can change. And then you get
 
- 
flash, it can change Q_SS and then
 it's flash. That's what you use in SONOS
 
- 
flash, stands for silicon oxide nitride
 oxide silicon. So there you have a
 
- 
standard again, NMOS in this case but you
 have a sandwich instead of a normal oxide
 
- 
layer and for the gate oxide you have a
 nitride and oxide. These oxide layers
 
- 
above and below the nitrate are called
 tunnel oxides. And the trick is that with
 
- 
high enough energy you tunnel electrons
 into the, through the oxide into the
 
- 
nitride where it's trapped and then you
 shift the operation voltage, the threshold
 
- 
of the transistor. And when you then put
 one at it it doesn't turn on anymore and
 
- 
that's essentially how the most used flash
 solution besides normal floating gate
 
- 
works. It's really simple. So. And after
 you get your wells out of the furnace, so
 
- 
I did a little detour. You want to make
 sure that the lateral diodes which got
 
- 
into existence after diffusion don't
 create unwanted short circuits. So we use
 
- 
the technology actually developed much
 later after one micron already has been
 
- 
out. It's called STI shallow trench
 isolation. It's from the ULSI technology
 
- 
as well as the silicide we use to reduce
 the resistance of the polysilicate.
 
- 
Here are some pictures, we did etch this
 one in the lab. That's the islands so that
 
- 
around everything going down that's the
 trenches in between the gates and between
 
- 
the wells. So we isolate them from each
 other. So the recipe is pretty easy.
 
- 
So either you have a plasma
 etcher around or if you're not
 
- 
rich and don't have money to buy a plasma
 etcher from eBay you can also get this
 
- 
tetramethylammonium hydroxide. And it's
 not even the german name, so cool, and
 
- 
dilute it with deionized water 3:1 and
 this 25% TMAH solution you heat
 
- 
it up to 80°C, dip your
 wafer in for six minutes and then you
 
- 
would get your structures. Metal is
 easier. So we did here the metal
 
- 
interconnect for the ring oscillator.
 They're etching it, also you make a
 
- 
vacuum, deposit 100 nanometres aluminum,
 30 nanometers titanium for passivation.
 
- 
Take the vacuum away dip it into HF until
 you don't see streaks on the titanium,
 
- 
then into aluminum etchant until you don't
 see streaks from the aluminum. And then
 
- 
you have your wires. I'll skip
 that one. That's just really interconnect.
 
- 
But I plan to make videos soon where I go
 through the you know like daily video blog
 
- 
of results but just that you see that you
 see the oxide depending on the angle it
 
- 
has different colors. So that's L2 the
 isolation. And then you see the
 
- 
topological measurement device. You see
 this one micron because we only deposited
 
- 
a micron for now. You'll see the heights
 the differences and we see that one micron
 
- 
is not enough. So we'd still have these
 sharp edges which we don't want. So we have
 
- 
back in Hong Kong have to deposit another
 2 microns. And if you want a follow up you
 
- 
go to my Github. OK? So Victor that's him
 and I have done that so far. It's only
 
- 
like two weeks because it took a lot of
 time to get all the masks manufactured and
 
- 
so a lot of bureaucracy. We already have
 that much and just stay tuned. We already
 
- 
have figured out so much in the last two
 weeks that it shouldn't be long before we
 
- 
can well finish all the features of Pearl
 River. Create models with Hawkins popcorn
 
- 
and start figuring out all the analog
 stuff for our MCU and then we make
 
- 
an MCU. That's the first thing we want to
 do as soon as we have the features figured
 
- 
out of Pearl River. If the Goddess is nice
 to us. Yeah it's a discordia figurine,
 
- 
it's really cheap on ebay. laugs
 So yeah. And that's like an overall
 
- 
of the features. And we want them build
 this microcontroller, and yes because all
 
- 
the folks don't believe that there are
 people who want to buy such items you
 
- 
please fill out the survey. That one
 is from Hagens trip, i skipped it but
 
- 
yeah. So yeah. Thanks. I'm done. And too
 late but sorry.
 
- 
applause 
- 
Herald: Thank you for the talk. No, but if
 you wait we have time for questions. So
 
- 
there are two microphones. One is in the
 middle and one is on the left side of the
 
- 
stage. Line up and we're going to take
 some questions and there is already one
 
- 
question from Microphone number two.
 Microphone 2: OK. So thank you for that
 
- 
interesting talk and all the development
 that you're doing. I was wondering have
 
- 
you had any time to test your transistors
 yet. And then later on do you plan to
 
- 
release some sort of analog simulation
 capabilities.
 
- 
David: Yes. Thats the plan for the next
 few weeks after I'm back in Hongkong. We
 
- 
did go back to the cleanroom. We actually
 wanted to provide already something for the
 
- 
Congress. Unfortunately we were noticed,
 short noticed that Thursday and Friday
 
- 
they take the wet stations and the
 machines offline for maintenance of the
 
- 
AC. So we have already like, the wafer, we
 have the isolation oxides but we didn't
 
- 
have any time left to actually test the
 the you know only having polysilicon is
 
- 
not enough. You have to also have metal to
 go with probes there, that stuff is
 
- 
micron size.
 Hagen: Okay. So your question as I
 
- 
understand was in the direction of
 simulation right? We like to measure all
 
- 
the structures we have to produce and with
 the values we get we like to feed in spice
 
- 
models. So you can do analog simulations.
 And yes we like to use this technology for
 
- 
analog stuff because as I already
 mentioned one micron size is enough for
 
- 
analog. You don't need smaller structures.
 Analog all this having huge transistor
 
- 
size from 20 or 50 Microns. So they
 are huge, you don't need this small
 
- 
technology. So they are quite feasible for
 analog stuff but let's say in this way if
 
- 
you're doing analog stuff in a
 conventional way you have to sign all the
 
- 
NDAs and you're stuck on this technology
 you're using. You can't transfer your
 
- 
design to the next fab because in the next
 fab the PDKs are different. You have to
 
- 
transfer or to translate all the
 structures there for a rebuild again for
 
- 
the new technology if you have a
 technology which you can take from one fab
 
- 
to another like our one. You are quite
 happy because the analog stuff you
 
- 
designed once also fits for the next fab.
 So yes of course we like to support analog
 
- 
stuff. We need help for that of course we
 have to measure, we are currently
 
- 
developing the wafer, we are currently
 working on the documents how to measure,
 
- 
what we like to measure and then we have
 to transfer the values to spice. But we
 
- 
have documented how we are doing that.
 And so everyone can use the knowledge.
 
- 
Mic 2: Thank you.
 Herald: Thank you. Mike one please.
 
- 
Mic 1: Do you have any plans for 
 open source mask production like.
 
- 
David: Yes. Actually the problem is only
 that as I mentioned before. If you want to
 
- 
have an opto mask for steppers that's
 always manufacturer specific. If you want
 
- 
to have a direct transfer mask not a
 problem. So I guess so Sam is really
 
- 
helpful in the lab. He runs the laser
 scriber. We could talk with the folks at
 
- 
NFF. They were really lovely helpful
 really. They really like to really help us
 
- 
a lot. And now that we talk with RCL.
 They also have laser scribers that we could
 
- 
actually also start producing masks in the
 long run. So yes that's certainly one of
 
- 
the things I intend to do is providing
 optical masks for exposure. Um yeah.
 
- 
Herald: Thank you. Uh one more question
 from microphone two.
 
- 
Mic 2: Great talk thanks. I'm really
 interested in the - what it would take to
 
- 
build the fab. What's the minimum set
 of tools. We've already seen a couple of
 
- 
orders of cost reduction in, through DIY
 bio hacking by making the tooling a lot
 
- 
cheaper. Do you see that happening within
 the nearest decades and your sort of work?
 
- 
David: Yes. So for instance I made my
 process by purpose this way that you can
 
- 
actually improvise most of it like the LTL
 growing and deposition and everything with
 
- 
a furnace. So what you need is a wet
 etcher like some wet etch station. You can
 
- 
actually there is a video from Jeri
 Ellsworth called "making microchips
 
- 
at home cooking with Jeri" and he does
 microchips in the kitchen so it's
 
- 
not, you get scared like HFS, it dissolves
 your bones and so on and then you see the
 
- 
guys who already have qualified, are
 qualified or employed there: they just
 
- 
without any PPE, nothing just grab into
 the HF. That's just the skill to scare
 
- 
folks from generating insurance problems.
 In general it's not really that dangerous
 
- 
right. You can do the stuff at home. No
 problem. Yeah. So we intend. So this
 
- 
process I made is so trivial. So we have
 also a branch called super low tech. We
 
- 
just shall essentially but it's more RnD.
 But you could actually help there for
 
- 
instance figure out the last details,
 get a furnace from eBay put it onto your
 
- 
kitchen table start RnD-ing make some git
 pull requests and we're super happy. Okay.
 
- 
So it's doable and the furnace you get on
 ebay. So no problem.
 
- 
Herald: Thank you. Microphone 1 again.
 Mic 1: So you just said about the
 
- 
analog stuff that a lot of that is usually
 under NDA from the fab. So have you
 
- 
encountered any problems with the fab and
 that you're currently using in that you're
 
- 
actually trying to discover these
 processes for yourself like you're
 
- 
generating competition that they might not
 like, have you had any problems with that.
 
- 
David: Oh no I had a nice phone calls,
 e-mails with the owner of the fab over in
 
- 
Tai Po who also has a second branch in
 Shenzhen that's RCL. I actually asked him
 
- 
recently "Hey is it okay when I use your
 logo in the presentation and implicitly
 
- 
make an advertisement for your fab here?"
 No prob go ahead. That is like...
 
- 
He's really eager to, LibreSilicon
 is what they need because every fab
 
- 
usually has to invest money in to develop
 it. First they develop a proprietary
 
- 
process right, or they license some
 proprietary process from another company
 
- 
and then they have to invest RnD costs to
 develop IP cores for their setup. With
 
- 
LibreSilicon the problem is solved for
 the companies because these foundry is
 
- 
using LibreSilicon everything the
 community develops is on github. And
 
- 
that's the IP catalog essentially.
 So they don't have to invest any
 
- 
additional money into RnD-ing IP cores
 that's in the nature of open source that
 
- 
there are IP cores popping into existence
 all the time. They can focus on the thing
 
- 
they're best at: making silicon, right? So
 it's actually positive but only for the
 
- 
small foundries that are really interested
 especially Shenzhen and now some in India
 
- 
and some of the big foundries and they
 will not, they are anyway the big
 
- 
companies have the tendency to be as
 mobile as a cargo ship. So it will take at
 
- 
least like two years until they
 acknowledge that LibreSilicon exists and
 
- 
then we might expect some legal you know
 bullying. But for now they won't even they
 
- 
just laugh right. They just laugh at best. 
- 
Herald: We're going to have two more
 questions before we're out of time.
 
- 
Microphone 2.
 Mic 2: Why did you go for the twin well
 
- 
process as opposed to the simpler single
 well?
 
- 
David: Uhm that's a good point. That's
 also something with portability and if you
 
- 
have different events or different
 supplier for substrate it might be that in
 
- 
n-doped or un-doped substrate. So with
 twin well architecture and actually we
 
- 
have on the n-well we also built p-bases
 and in these n-bases, so we have actually
 
- 
like stacked wells in the n-wells and
 p-wells. So actually it's a one two. Um
 
- 
Pentagon Well I don't know. Um and it's
 just that you can shift to
 
- 
the doping of the n- and the p-substrate.
 According that you fit LibreSilicon
 
- 
requirements to still have the physical
 properties ensured by LibreSilicon. No
 
- 
matter whether you get your substrate from
 somewhere from Great Britain or from
 
- 
TaoBao.
 Hagen: Okay. The thing is we looked before
 
- 
at eBay which wafer we can get. Currently
 NFF is supporting us with wafers. But if
 
- 
you're looking on eBay or Alibaba. What
 else. We get different wafers with
 
- 
different dope agents.
 And if you have something with say OK
 
- 
we're just building an n-well we have to
 verify or lie on the p-base right, or on
 
- 
the p-substrate. And to avoid the obstacle
 the difficulty is: we're doing twin-wells.
 
- 
We can just regulate our own dopant inside
 and we are fine. We don't want to have to
 
- 
rely on the wafer or substrate itself.
 What was the basic point.
 
- 
Herald: Thank you. And the last question
 from microphone 2.
 
- 
Mic 2: So once you have your complete die
 how about packaging and bonding because
 
- 
if you want to use it you have to place it
 somehow on the PCB.
 
- 
David: Yes. So um. We have a bonding setup
 at Tai Po already. That's what still is
 
- 
being used at the moment in Hong Kong is
 to bond a packaging. Then we have some
 
- 
guys in HK SDP with packaging set up they
 have and can make nice tape reels and they
 
- 
have also like uh after packaging tests
 like: did the bonding work, is it damaged
 
- 
by the bonding, and so on. Hagen and I
 have figured out some nice bonding pad
 
- 
design which didn't fit at all anymore
 into the talk I already over talk like
 
- 
that. And but it absorbs the physical
 stress from bonding. So we think that
 
- 
it's aluminum covered with titanium so you
 don't have to sweat away any oxides right
 
- 
you have better bonding capability, better
 bonding properties. So it shouldn't be
 
- 
such a problem. And we have plenty of
 bonding and packaging labs which have
 
- 
already promised to help us. So it's
 really like small like to choose which one
 
- 
we take.
 Hagen: Just an annotation if you like a
 
- 
dedicated package please mail us. Right.
 We are fixed now on the dual in-line
 
- 
package. We are thinking about flip chip
 BGA but if you have other package which is
 
- 
more common for tinkerer or something like
 that please mail us.
 
- 
Herald: Thank you. Thank you for the talk.
 That was the talk on LibreSilicon,
 
- 
leviathan, chipforge, Andreas Westerwick
 and Victor. Thank you. Thank you.
 
- 
applause 
- 
postroll music 
- 
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